Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/27/2024
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Application #:
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17406612
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Filing Dt:
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08/19/2021
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Publication #:
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Pub Dt:
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02/23/2023
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Inventors:
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Choong-man Lee, Soo Doo Chae, Angelique Raley, Qiaowei Lou, Toshio Hasegawa et al
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Title:
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Extreme Ultraviolet Lithography Patterning Method
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| AKASAKA BIZ TOWER |
| 3-1 AKASAKA 5-CHOME |
| MINATO-KU, TOKYO, JAPAN 107-6325 |
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| SLATER MATSIL, LLP |
| 17950 PRESTON ROAD |
| SUITE 1000 |
| DALLAS, TX 75252 |
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05/11/2024 02:45 PM
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