Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/07/2023
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Application #:
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17460108
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Filing Dt:
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08/27/2021
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Publication #:
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Pub Dt:
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03/02/2023
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Inventors:
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Yu-Chih HUANG, Shang-Chieh CHIEN, Yu-Huan CHEN, Ming-Hsun TSAI, Heng-Hsin LIU
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Title:
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APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK |
| HSINCHU, TAIWAN 300 |
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| MCDERMOTT WILL & EMERY LLP |
| THE MCDERMOTT BUILDING |
| 500 NORTH CAPITOL STREET NW |
| WASHINGTON, DC 20001 |
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