Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17536518
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Filing Dt:
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11/29/2021
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Publication #:
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Pub Dt:
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03/02/2023
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Inventors:
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Kwang Sung YOO, A Ram KIM, Song I HAN
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 48, SAMSUNG 1-RO 4-GIL, |
| HWASEONG-SI, GYEONGGI-DO, KOREA, REPUBLIC OF 18449 |
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| HARNESS, DICKEY & PIERCE, P.L.C |
| P.O. BOX 8910 |
| RESTON, VA 20195 |
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