Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17988432
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Filing Dt:
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11/16/2022
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Publication #:
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Pub Dt:
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03/09/2023
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Inventors:
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Jui-Chieh CHEN, Tsung-Chih CHIEN, Chih-Tsung SHIH, Tsung-Chuan LEE
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Title:
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OPERATING METHOD FOR PREVENTING PHOTOMASK PARTICULATE CONTAMINATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK |
| HSINCHU, TAIWAN 300-78 |
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| BIRCH, STEWART, KOLASCH & BIRCH, LLP |
| 8110 GATEHOUSE ROAD |
| SUITE 100E |
| FALLS CHURCH, VA 22042 |
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