Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/10/2023
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Application #:
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17830389
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Filing Dt:
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06/02/2022
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Publication #:
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Pub Dt:
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03/09/2023
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Inventor:
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Alexander Krokhmal
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Title:
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Spot-size control in reflection-based and scatterometry-based X-ray metrology systems
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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P.O. BOX 103 |
MIGDAL HAEMEK, ISRAEL 23100 |
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KLIGLER & ASSOCIATES PATENT ATTORNEYS LTD. |
P.O. BOX 57651 |
TEL AVIV, 6157601 ISRAEL |
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09/22/2024 09:46 AM
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