Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/12/2024
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Application #:
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17684206
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Filing Dt:
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03/01/2022
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Publication #:
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Pub Dt:
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03/23/2023
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Inventors:
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Katsuhiro SATO, Hiroshi Fujita, Tatsuhiko Koide
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Title:
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SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND A SEMICONDUCTOR DEVICE MANUFACTURING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-21, SHIBAURA 3-CHOME, MINATO-KU |
| TOKYO, JAPAN 108-0023 |
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| KIM & STEWART LLP |
| 111 N. MARKET ST. |
| SUITE 414 |
| SAN JOSE, CA 95113 |
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04/27/2024 06:32 PM
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