Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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18087262
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Filing Dt:
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12/22/2022
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Publication #:
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Pub Dt:
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04/27/2023
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Inventors:
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Sandro HOFFMANN, Sebastian STROBEL, Christoph NOTTBOHM, Michael KRAUSE, Hartmut ENKISCH et al
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Title:
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OPTICAL ELEMENT FOR A EUV PROJECTION EXPOSURE SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| RUDOLF-EBER-STRASSE 2 |
| OBERKOCHEN, GERMANY 73447 |
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| GEORGE F. LEHNIGK |
| 9801 WASHINGTONIAN BLVD |
| SUITE 750 |
| GAITHERSBURG, MD 20878 |
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