Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17974019
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Filing Dt:
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10/26/2022
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Publication #:
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Pub Dt:
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05/04/2023
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Inventors:
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Yan Liu, Jakub Rybczynski, Steven Donnell, Caleb Minsky
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Title:
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ELECTROSTATIC CHUCK THAT INCLUDES UPPER CERAMIC LAYER THAT INCLUDES A DIELECTRIC LAYER, AND RELATED METHODS AND STRUCTURES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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129 CONCORD ROAD |
BILLERICA, MASSACHUSETTS 01821 |
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ENTEGRIS, INC. |
129 CONCORD ROAD |
BILLERICA, MA 01821 |
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09/24/2024 11:35 AM
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