Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17690150
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Filing Dt:
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03/09/2022
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Publication #:
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Pub Dt:
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05/18/2023
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Inventors:
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I-Hsiung HUANG, Yung-Cheng Chen, Chi-Lun Lu
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Title:
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METHODS FOR CLEANING LITHOGRAPHY MASK
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK |
| HSINCHU, TAIWAN 300-78 |
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| FAY SHARPE LLP |
| 1228 EUCLID AVE |
| FLOOR 5 |
| CLEVELAND, OH 44115 |
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05/28/2024 06:49 AM
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