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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
18067201
Filing Dt:
12/16/2022
Publication #:
Pub Dt:
06/22/2023
Inventors:
Kentaro OSHIMO, Yudo SUGAWARA, Akihiro KURIBAYASHI, Hyunyoung GO, Akashi FUJIO
Title:
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE REMOVAL METHOD
Assignment: 1
Reel/Frame:
062126/0505Recorded: 12/16/2022Pages: 12
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
11/29/2022
Exec Dt:
12/08/2022
Exec Dt:
12/08/2022
Exec Dt:
11/29/2022
Exec Dt:
11/29/2022
Assignee:
3-1, AKASAKA 5-CHOME, MINATO-KU,
TOKYO, JAPAN 107-6325
Correspondent:
IPUSA, P.L.L.C
1054 31ST STREET, N.W.
SUITE 400
WASHINGTON, DC 20007

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