Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/21/2024
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Application #:
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18109183
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Filing Dt:
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02/13/2023
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Publication #:
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Pub Dt:
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06/22/2023
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Inventors:
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Ming-Hsun LIN, Yu-Hsiang HO, Jhun Hua CHEN, Chi-Hung LIAO, Teng Kuei CHUANG
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Title:
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METHOD AND APPARATUS FOR IMPROVING CRITICAL DIMENSION VARIATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK |
| HSINCHU, TAIWAN 300-78 |
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| NZ CARR LAW OFFICE |
| 2101 CITYWEST BLVD. STE 100 |
| HOUSTON, TX 77042 |
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