Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17927974
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Filing Dt:
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11/28/2022
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Publication #:
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Pub Dt:
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07/06/2023
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Inventors:
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Lei Shi, Guopeng Lu, Jian Zi, Tongyu Li, Ang Chen, Haiwei Yin
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Title:
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METROLOGY METHOD AND SYSTEM FOR CRITICAL DIMENSIONS BASED ON DISPERSION RELATION IN MOMENTUM SPACE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 220 HANDAN RD., YANGPU DISTRICT |
| SHANGHAI, CHINA 200433 |
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| ROOM 412-1, BUILDING 4, 200, EAST GUODING ROAD, YANGPU DISTRICT |
| SHANGHAI, CHINA 200433 |
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| ZHENG LI |
| KING & WOOD MALLESONS |
| 17TH FLOOR, ONE ICC, 999 MIDDLE HUAIHAI ROAD |
| SHANGHAI, 200031 CHINA |
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