Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17572397
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Filing Dt:
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01/10/2022
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Publication #:
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Pub Dt:
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07/13/2023
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Inventors:
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Sean KANG, Olivier LUERE, Kenji TAKESHITA, Sanghyuk CHOI, Mengnan ZOU, Zihao DING
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Title:
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BIAS VOLTAGE MODULATION APPROACH FOR SiO/SiN LAYER ALTERNATING ETCH PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| PATTERSON + SHERIDAN, LLP |
| 595 SHREWSBURY AVE |
| SUITE 100 |
| SHREWSBURY, NJ 07702 |
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