Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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18115137
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Filing Dt:
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02/28/2023
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Publication #:
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Pub Dt:
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09/07/2023
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Inventors:
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Takahiro YONEZAWA, Shinya ISHIKAWA, Sho KUMAKURA, Takayuki KATSUNUMA, Koki TANAKA
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Title:
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PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| WEIHROUCH IP |
| 1737 KING STREET |
| SUITE 200 |
| ALEXANDRIA, VA 22314 |
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