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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
18306798
Filing Dt:
04/25/2023
Publication #:
20230307295
Pub Dt:
09/28/2023
Inventors:
Masanori NAKAYAMA, Yasutoshi Tsubota, Katsunori Funaki, Hiroto Igawa, Yuki Yamakado et al
Title:
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
Assignment: 1
Reel/Frame:
063464/0949Recorded: 04/27/2023Pages: 11
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
NAKAYAMA, MASANORI
Exec Dt:
02/25/2020
FUNAKI, KATSUNORI
Exec Dt:
02/25/2020
UEDA, TATSUSHI
Exec Dt:
02/21/2020
TSUBOTA, YASUTOSHI
Exec Dt:
02/25/2020
TAKESHIMA, YUICHIRO
Exec Dt:
02/25/2020
IGAWA, HIROTO
Exec Dt:
02/25/2020
YAMAKADO, YUKI
Exec Dt:
02/21/2020
Assignee:
KOKUSAI ELECTRIC CORPORATION
3-4, KANDAKAJI-CHO, CHIYODA-KU
TOKYO, JAPAN 101-0045
Correspondent:
VOLPE KOENIG
30 SOUTH 17TH STREET, 18TH FLOOR
PHILADELPHIA, PA 19103

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