Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17693409
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Filing Dt:
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03/13/2022
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Publication #:
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Pub Dt:
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10/05/2023
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Inventors:
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Abdul Aziz Khaja, Juan Carlos Rocha-Alvarez
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Title:
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RADIO FREQUENCY SOURCE FOR INDUCTIVELY COUPLED AND CAPACITIVELY COUPLED PLASMAS IN SUBSTRATE PROCESSING CHAMBERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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KILPATRICK TOWNSEND & STOCKTON LLP |
1100 PEACHTREE STREET, SUITE 2800 |
ATLANTA, GA 30309 |
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05/28/2024 09:37 AM
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