Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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18231017
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Filing Dt:
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08/07/2023
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Publication #:
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Pub Dt:
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11/30/2023
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Inventors:
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Shang-Chieh CHIEN, Li-Jui CHEN, Po-Chung CHENG, Chia-Chen CHEN, Jen-Yang CHUNG et al
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Title:
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EUV LIGHT SOURCE AND APPARATUS FOR LITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK |
| HSINCHU, TAIWAN 300 |
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| MCDERMOTT WILL & EMERY LLP |
| 500 NORTH CAPITOL STREET, NW |
| WASHINGTON, DC 20001 |
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05/30/2024 02:47 AM
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