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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
17834278
Filing Dt:
06/07/2022
Publication #:
Pub Dt:
12/07/2023
Inventors:
Anantha Subramani, Yang Guo, Seyyed Fazeli, Kelvin Chan, Chandrashekara Baginagere et al
Title:
PLASMA CHAMBER WITH GAS CROSS-FLOW, MICROWAVE RESONATORS AND A ROTATABLE PEDESTAL FOR MULTIPHASE CYCLIC DEPOSITION
Assignment: 1
Reel/Frame:
060942/0402Recorded: 08/30/2022Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
08/19/2022
Exec Dt:
08/21/2022
Exec Dt:
08/22/2022
Exec Dt:
08/19/2022
Exec Dt:
08/23/2022
Exec Dt:
08/19/2022
Exec Dt:
08/19/2022
Assignee:
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondent:
STEPHEN G. SULLIVAN
1211 SW FIFTH AVENUE
SUITE 1900
PORTLAND, OR 97204

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