Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17836657
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Filing Dt:
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06/09/2022
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Publication #:
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Pub Dt:
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12/14/2023
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Inventors:
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Songjae LEE, Masato ISHII, Martin TRUEMPER, Richard O. COLLINS, Martin Jeffrey SALINAS et al
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Title:
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PLASMA PRECLEAN SYSTEM FOR CLUSTER TOOL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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PATTERSON & SHERIDAN, LLP |
24 GREENWAY PLAZA |
SUITE 1600 |
HOUSTON, TX 77046 |
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09/23/2024 11:22 AM
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