Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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18118023
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Filing Dt:
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03/06/2023
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Publication #:
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Pub Dt:
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01/04/2024
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Inventors:
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Tzu Jeng HSU, Shy-Jay LIN, Chih-Wei WEN, Hsin-Fu TSENG, Chien-Hsing LU, Chih-Chiang TU
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Title:
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EUV SOURCE STABILIZATION APPARATUS AND METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK |
| HSINCHU, TAIWAN |
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| MCDERMOTT WILL & EMERY LLP |
| 500 NORTH CAPITOL STREET, NW |
| WASHINGTON, DC 20001 |
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05/30/2024 01:17 AM
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