Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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18253798
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Filing Dt:
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05/22/2023
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Publication #:
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Pub Dt:
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01/04/2024
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Inventors:
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Lutz REBSTOCK, Ulrich QUARTI, Tobias FORSTNER
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Title:
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METHOD AND SYSTEM FOR INSPECTION OF AN INNER POD OR AN OUTER POD OF AN EUV POD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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DAIMLERSTRABE 7 |
STEIBLINGEN, GERMANY 78256 |
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PERMAN & GREEN, LLP |
99 HAWLEY LANE |
STRATFORD, CT 06614 |
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09/24/2024 11:01 AM
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