Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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18504420
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Filing Dt:
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11/08/2023
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Publication #:
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Pub Dt:
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03/07/2024
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Inventors:
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Masamichi YACHI, Takayuki NAKADA
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Title:
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SUBSTRATE PROCESSING APPARATUS AND EXHAUST SYSTEM CAPABLE OF ADJUSTING INNER PRESSURE OF PROCESS CHAMBER THEREOF, AND METHOD THEREOF
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-4, KANDAKAJI-CHO, CHIYODA-KU |
| TOKYO, JAPAN 101-0045 |
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| GERALD B. HALT JR. |
| VOLPE KOENIG |
| 30 SOUTH 17TH STREET, 18TH FLOOR |
| PHILADELPHIA, PA 19103 |
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