Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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18272938
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Filing Dt:
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07/18/2023
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Publication #:
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Pub Dt:
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03/14/2024
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Inventors:
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Munehito KAGAYA, Yuji OTSUKI, Yusuke SUZUKI
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Title:
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METHOD OF FORMING SILICON NITRIDE FILM AND FILM FORMING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1 AKASAKA 5-CHOME |
| MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| NATH, GOLDBERG & MEYER |
| 112 S WEST ST |
| ALEXANDRIA, VA 22314 |
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05/10/2024 04:14 AM
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