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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
18535840
Filing Dt:
12/11/2023
Publication #:
Pub Dt:
04/25/2024
Inventors:
John Szilagyi, Ilya Bezel
Title:
SYSTEM AND METHOD FOR VACUUM ULTRAVIOLET LAMP ASSISTED IGNITION OF OXYGEN-CONTAINING LASER SUSTAINED PLASMA SOURCES
Assignment: 1
Reel/Frame:
065832/0353Recorded: 12/11/2023Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
10/28/2019
Exec Dt:
11/11/2019
Assignee:
ONE TECHNOLOGY DRIVE
MILPITAS, CALIFORNIA 95035
Correspondent:
SUITER SWANTZ/KLA JOINT CUSTOMER NUMBERS
14301 FNB PARKWAY
SUITE 220
OMAHA, NE 68154-5299

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