Patent Assignment Abstract of Title
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
|
Total Assignments:
1
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
18417304
|
Filing Dt:
|
01/19/2024
|
|
Publication #:
|
|
Pub Dt:
|
05/16/2024
| | | | |
|
Inventors:
|
Surajit Kumar, Hari Soundararajan, Hui Chen, Shou-Sung Chang
|
|
Title:
|
APPARATUS AND METHOD FOR CMP TEMPERATURE CONTROL
|
|
|
Assignment:
1
|
|
|
|
|
|
|
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
|
|
|
|
|
|
|
|
|
| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
|
|
|
|
| ALLEN EASTLUND |
| FISH & RICHARDSON P.C. |
| P.O. BOX 1022 |
| MINNEAPOLIS, MN 55440-1022 |
|
|
Search Results as of:
06/03/2024 12:45 PM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|
