Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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18286310
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Filing Dt:
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10/10/2023
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Publication #:
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Pub Dt:
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06/13/2024
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Inventors:
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Kunihiro YAMAUCHI, Hikaru KITAYAMA, Akiou KIKUCHI
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Title:
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SURFACE TREATMENT METHOD, DRY ETCHING METHOD, CLEANING METHOD, PRODUCTION METHOD FOR SEMICONDUCTOR DEVICE, AND ETCHING DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5253, OAZA OKIUBE, UBE-SHI, |
| YAMAGUCHI, JAPAN 7550001 |
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| WENDEROTH, LIND & PONACK, LLP |
| 1025 CONNECTICUT AVENUE, N.W. |
| SUITE 500 |
| WASHINGTON, DC 20036 |
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