Patent Assignment Details
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| Reel/Frame: | 004498/0028 | |
| Pages: | 1 |
| | Recorded: | 12/27/1985 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST. |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/24/1988
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Application #:
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06813864
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Filing Dt:
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12/27/1985
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Title:
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METHOD FOR MICROFABRICATION OF PATTERN ON SUBSTRATE USING X-RAY SENSITIVE RESIST
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Assignee
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| 2-3 MARUNOUCHI 2-CHOME, |
| CHIYODA-KU, TOKYO, JAPAN |
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Correspondence name and address
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LOWE, KING, PRICE & BECKER
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P.O. BOX 19899
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ALEXANDRIA, VA 22320
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