Patent Assignment Details
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| Reel/Frame: | 005114/0277 | |
| Pages: | 1 |
| | Recorded: | 08/11/1989 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST. |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/11/1991
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Application #:
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07392582
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Filing Dt:
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08/11/1989
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Title:
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METHOD OF WET ETCHNG BY USE OF PLASMA ETCHED CARBONACEOUS MASKS
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Assignee
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| 398, HASE ATSUGI-SHI, |
| KANAGAWA-KEN, 243, JAPAN |
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Correspondence name and address
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SIXBEY, FRIEDMAN, LEEDOM & FERGUSON
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2010 CORPORATE RIDGE, SUITE 600
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MC LEAN, VA 22102
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