Patent Assignment Details
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| Reel/Frame: | 005313/0930 | |
| Pages: | 2 |
| | Recorded: | 05/21/1990 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST. |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/04/1992
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Application #:
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07526220
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Filing Dt:
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05/21/1990
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Title:
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PLASMA ETCH APPARATUS WITH CONDUCTIVE COATING ON INNER METAL SURFACES OF CHAMBER TO PROVIDE PROTECTION FROM CHEMICAL CORROSION
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Assignee
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| 3050 BOWERS AVENUE, A CORP OF DE |
| SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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PAUL L. HICKMAN
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LEGAL AFFAIRS DEPARTMENT
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APPLIED MATERIALS, INC.
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3050 BOWERS AVENUE
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SANTA CLARA, CA 95054
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