Patent Assignment Details
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Reel/Frame: | 005448/0170 | |
| Pages: | 3 |
| | Recorded: | 08/15/1990 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST. |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/11/1992
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Application #:
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07538696
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Filing Dt:
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06/18/1990
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Title:
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DRY ETCHING APPARATUS AND METHOD
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Assignee
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8-1, YOTSUYA 5-CHOME, FUCHU-SHI, A CORP. OF JAPAN |
TOKYO, JAPAN 183 |
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Correspondence name and address
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MORRIS LISS
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POLLOCK, VANDE SANDE & PRIDDY
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1990 M STREET, N.W., SUITE 800
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WASHINGTON, D.C. 20036
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