Patent Assignment Details
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| Reel/Frame: | 005741/0992 | |
| Pages: | 4 |
| | Recorded: | 06/24/1991 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST. |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/13/1993
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Application #:
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07682618
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Filing Dt:
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04/08/1991
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Title:
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PLASMA ETCHING APPARATUS WITH ACCURATE TEMPERATURE AND VOLTAGE LEVEL CONTROL ON DEVICE UNDER TEST
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Assignee
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| 28-6 TOSHINCHO, 1-CHOME, ITABASHI-KU, |
| TOKYO, JAPAN |
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Correspondence name and address
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STUART L. MERKADEAU
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GRAHAM & JAMES
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725 SOUTH FIGUEROA STREET
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34TH FLOOR
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LOS ANGELES, CA. 90017
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