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Patent Assignment Details
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Reel/Frame:007178/0668   Pages: 12
Recorded: 08/22/1994
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
05/14/1996
Application #:
08269863
Filing Dt:
06/30/1994
Title:
CONTACTLESS REAL-TIME IN-SITU MONITORING OF A CHEMICAL ETCHING PROCESS
Assignors
1
Exec Dt:
06/30/1994
2
Exec Dt:
06/30/1994
3
Exec Dt:
07/12/1994
4
Exec Dt:
07/13/1994
5
Exec Dt:
06/30/1994
6
Exec Dt:
06/30/1994
7
Exec Dt:
07/11/1994
Assignee
1
OLD ORCHARD ROAD
ARMONK, NEW YORK 10504
Correspondence name and address
DALE M. CROCKATT
IBM CORPORATION
INTELLECTUAL PROPERTY LAW DEPT.
1580 ROUTE 52
HOPEWELL JUNCTION, NY 12533-6531

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