Patent Assignment Details
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| Reel/Frame: | 007184/0639 | |
| Pages: | 3 |
| | Recorded: | 09/12/1994 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/02/1996
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Application #:
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08269860
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Filing Dt:
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06/30/1994
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Title:
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METHOD FOR CONTACTLESS REAL-TIME IN SITU MONITORING OF A CHEMICAL ETCHING PROCESS
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Assignee
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| OLD ORCHARD ROAD |
| ARMONK, NEW YORK 10504 |
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Correspondence name and address
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IBM CORPORATION
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DEPT. 34H/BLDG. 300-482
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1580 ROUTE 52
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HOPEWELL JUNCTION, NY 12533-6531
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MICHAEL J. BALCONI-LAMICA
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