Patent Assignment Details
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Reel/Frame: | 007959/0246 | |
| Pages: | 3 |
| | Recorded: | 04/18/1996 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/26/1998
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Application #:
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08634410
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Filing Dt:
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04/18/1996
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Title:
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CHARGED-PARTICLE-BEAM EXPOSURE DEVICE AND CHARGED-PARTICLE-BEAM EXPOSURE METHOD
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Assignee
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1-1, KAMIKODANAKA 4-CHOME, NAKAHARA-KU, KAWASAKI-SHI |
KANAGAWA 211, JAPAN |
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Correspondence name and address
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STAAS & HALSEY
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ATTN: H. J. STAAS
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700 ELEVENTH STREET, N.W.
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SUITE 500
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WASHINGTON, D.C. 20001
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