Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 008075/0866 | |
| Pages: | 3 |
| | Recorded: | 08/12/1996 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/02/1999
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Application #:
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08574838
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Filing Dt:
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12/19/1995
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Title:
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IN-SITU SUBSTRATE TEMPERATURE MEASUREMENT SCHEME IN PLASMA REACTOR
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Assignee
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| PATENT COUNSEL |
| 3050 BOWERS AVENUE, P.O. BOX 450A |
| SANTA CLARA, CALIFORNIA 95051 |
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Correspondence name and address
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APPLIED MATERIALS, INC.
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MICHAEL B. EINSCHLAG, PATENT COUNSEL
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3035 BOWERS AVE., P.O. BOX 450A
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SANTA CLARA, CA 95052
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