Patent Assignment Details
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| Reel/Frame: | 008588/0176 | |
| Pages: | 3 |
| | Recorded: | 03/17/1997 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/23/1999
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Application #:
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08820461
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Filing Dt:
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03/17/1997
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Title:
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AUTOMATIC SUPERVISION SYSTEM ON THE ION BEAM MAP FOR ION IMPLANTATION PROCESS
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Assignee
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| SCIENCE-BASED INDUSTRIAL PARK |
| NO. 9, CREATION RD. 1, |
| HSINCHU, TAIWAN R.O.C |
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Correspondence name and address
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CHRISTENSEN O'CONNOR JOHNSON ET AL
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LAWRENCE E. LYCKE, ESQ.
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1420 FIFTH AVENUE, SUITE 2800
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SEATTLE, WA 98101-2347
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