Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 009074/0876 | |
| Pages: | 3 |
| | Recorded: | 03/30/1998 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
6
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Patent #:
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Issue Dt:
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07/14/1998
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Application #:
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08696224
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Filing Dt:
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08/13/1996
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Title:
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PLASMA PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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04/14/1998
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Application #:
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08715489
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Filing Dt:
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09/18/1996
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Title:
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METHOD AND DEVICE FOR DETECTING THE END POINT OF PLASMA PROCESS
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Patent #:
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Issue Dt:
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01/12/1999
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Application #:
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08777907
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Filing Dt:
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12/20/1996
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Title:
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SEMICONDUCTOR WAFER ETCHING METHOD AND POST-ETCHING PROCESS
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Patent #:
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Issue Dt:
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09/08/1998
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Application #:
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08824970
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Filing Dt:
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03/27/1997
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Title:
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PROBE APPARATUS WITH TILT CORRECTION MECHANISMS
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Patent #:
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Issue Dt:
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08/29/2000
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Application #:
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08843129
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Filing Dt:
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04/28/1997
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Title:
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PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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11/09/1999
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Application #:
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08899864
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Filing Dt:
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07/24/1997
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Title:
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METHOD AND DEVICES FOR DETECTING THE END POINT OF PLASMA PROCESS
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Assignee
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| 3-6 AKASAKA 5-CHOME |
| MINATO-KU, TOKYO 107, JAPAN |
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Correspondence name and address
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OBLON, SPIVAK, MCCLELLAND, ET AL.
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MARVIN J. SPIVAK
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FOURTH FLOOR
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1755 JEFFERSON DAVIS HIGHWAY
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ARLINGTON, VA 22202
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