Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 009453/0199 | |
| Pages: | 3 |
| | Recorded: | 09/10/1998 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
11
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Patent #:
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Issue Dt:
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03/10/1998
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Application #:
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08692436
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Filing Dt:
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08/05/1996
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Title:
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SEMICONDUCTOR WAFER PROCESSING APPARATUS INCLUDING LOCALIZED HUMIDIFICATION BETWEEN COATING AND HEAT TREATMENT SECTIONS
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Patent #:
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Issue Dt:
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09/30/1997
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Application #:
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08697132
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Filing Dt:
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08/20/1996
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Title:
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SUBSTRATE DRYING APPARATUS AND SUBSTRATE DRYING METHOD
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Patent #:
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Issue Dt:
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03/30/1999
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Application #:
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08743836
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Filing Dt:
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11/05/1996
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Title:
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WASHING APPARATUS, AND WASHING METHOD
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Patent #:
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Issue Dt:
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09/08/1998
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Application #:
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08753768
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Filing Dt:
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11/29/1996
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Title:
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METHOD OF FORMING A COATING FILM AND COATING APPARATUS
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Patent #:
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Issue Dt:
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07/14/1998
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Application #:
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08768884
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Filing Dt:
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12/17/1996
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Title:
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RESIST PROCESSING METHOD AND APPARATUS
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Patent #:
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Issue Dt:
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03/16/1999
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Application #:
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08798342
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Filing Dt:
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02/10/1997
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Title:
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METHOD OF CLEANING A SUBSTRATE BY SCRUBBING
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Patent #:
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Issue Dt:
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01/27/1998
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Application #:
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08837520
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Filing Dt:
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04/22/1997
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Title:
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SUBSTRATE TRANSFER APPARATUS
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Patent #:
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Issue Dt:
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10/20/1998
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Application #:
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08868963
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Filing Dt:
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06/05/1997
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Title:
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APPARATUS AND METHOD FOR DEVELOPING RESIST COATED ON SUBSTRATE
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Patent #:
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Issue Dt:
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10/12/1999
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Application #:
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08890996
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Filing Dt:
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07/10/1997
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Title:
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DOUBLE-SIDED SUBSTRATE CLEANING APPARATUS AND CLEANING METHOD USING THE SAME
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Patent #:
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Issue Dt:
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02/16/1999
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Application #:
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08929106
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Filing Dt:
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09/15/1997
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Title:
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PROCESSING APPARATUS AND PROCESSING METHOD
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Patent #:
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Issue Dt:
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02/16/1999
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Application #:
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08963723
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Filing Dt:
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11/04/1997
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Title:
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LIQUID COOLING APPARATUS FOR USE WITH ELECTRONIC EQUIPMENT
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Assignee
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| 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO 107, JAPAN |
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Correspondence name and address
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OBLON, SPIVAK, MCCLELLAND, MAIER ET AL
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MARVIN J. SPIVAK
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1755 JEFFERSON DAVIS HIGHWAY, 4TH FLOOR
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ARLINGTON, VA 22202
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