Patent Assignment Details
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| Reel/Frame: | 009474/0229 | |
| Pages: | 3 |
| | Recorded: | 09/25/1998 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/03/2002
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Application #:
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09119162
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Filing Dt:
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07/20/1998
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Title:
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APPARATUS AND METHODS FOR DETECTING THICKNESS OF A PATTERNED LAYER
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Assignee
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| 2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU |
| FUJI BUILDING |
| TOKYO 100, JAPAN |
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Correspondence name and address
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KLARQUIST SPARKMAN CAMPBELL ET AL.
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DONALD L. STEPHENS JR.
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ONE WORLD TRADE CENTER, SUITE 1600
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121 S.W. SALMON STREET
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PORTLAND, OR 97204-2988
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