Patent Assignment Details
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| Reel/Frame: | 009536/0415 | |
| Pages: | 3 |
| | Recorded: | 10/23/1998 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/10/2000
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Application #:
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09177939
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Filing Dt:
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10/23/1998
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Title:
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WAFER CLEANING APPARATUS AND STRUCTURE FOR HOLDING AND TRANSFERRING WAFER USED IN WAFER CLEANING APPARATUS
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Assignee
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| 1-3, SHIBAZAKI 2-CHOME, CHOFU-SHI |
| TOKYO, 182-8602, JAPAN |
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Correspondence name and address
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COOK, MCFARRON & MANZO, LTD.
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EDWARD D. MANZO, ESQ.
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200 WEST ADAMS STREET
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SUITE 2850
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CHICAGO, IL 60606
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