Patent Assignment Details
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| Reel/Frame: | 010026/0451 | |
| Pages: | 2 |
| | Recorded: | 06/02/1999 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/30/2002
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Application #:
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09324080
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Filing Dt:
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06/01/1999
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Title:
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POLISHING PROCESS MONITORING METHOD AND APPARATUS, ITS ENDPOINT DETECTION METHOD, AND POLISHING MACHINE USING SAME
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Assignee
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| 7-1 SHIBA 5-CHOME, MINATO KU |
| TOKYO, JAPAN |
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Correspondence name and address
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LAFF, WHITESEL, CONTE & SARET, LTD.
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J. WARREN WHITESEL
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401 NORTH MICHIGAN AVENUE
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CHICAGO, ILLINOIS 60611-4212
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