Patent Assignment Details
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| Reel/Frame: | 010266/0079 | |
| Pages: | 3 |
| | Recorded: | 09/27/1999 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/25/2000
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Application #:
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08965658
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Filing Dt:
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11/06/1997
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Title:
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ELIMINATION OF TITANIUM NITRIDE FILM DEPOSITION IN TUNGSTEN PLUG TECHNOLOGY USING PE-CVD-TI AND IN-SITU PLASMA NITRIDATION
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Assignee
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| TBS BROADCAST CENTER, 3-6 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO 107, JAPAN |
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Correspondence name and address
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WOOD, HERRON & EVANS, L.L.P.
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JOSEPH R. JORDAN, ESQ.
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2700 CAREW TOWER
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CINCINNATI, OH 45202
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