Patent Assignment Details
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| Reel/Frame: | 010275/0126 | |
| Pages: | 5 |
| | Recorded: | 09/28/1999 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/05/2002
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Application #:
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09345639
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Filing Dt:
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06/30/1999
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Title:
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TECHNIQUES FOR IMPROVING ETCH RATE UNIFORMITY
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Assignee
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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Correspondence name and address
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BEYER & WEAVER, LLP
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RAMIN MAHBOUBIAN
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P.O. BOX 61059
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PALO ALTO, CA 94306
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