Patent Assignment Details
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Reel/Frame: | 010820/0957 | |
| Pages: | 2 |
| | Recorded: | 05/24/2000 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/30/2002
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Application #:
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09577126
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Filing Dt:
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05/24/2000
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Publication #:
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Pub Dt:
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02/28/2002
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Title:
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CHEMICAL MECHANICAL POLISHING MACHINE AND CHEMICAL MECHANICAL POLISHING METHOD
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Assignee
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292 YOSHIDA-CHO, TOTSUKA-KU |
YOKOHAMA, KANAGAWA 244-0817, JAPAN |
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Correspondence name and address
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FOLEY & LARDNER
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WILLIAM T. ELLIS
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WASHINGTON HARBOUR
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3000 K STREET, N.W, SUITE 500
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WASHINGTON, D.C. 20007-5109
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