Patent Assignment Details
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| Reel/Frame: | 010887/0111 | |
| Pages: | 3 |
| | Recorded: | 06/19/2000 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/17/2002
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Application #:
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09597654
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Filing Dt:
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06/19/2000
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Title:
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METHOD OF MEASURING NEGATIVE ION DENSITY OF PLASMA AND PLASMA PROCESSING METHOD AND APPARATUS FOR CARRYING OUT THE SAME
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Assignee
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| MINATO-KU |
| 3-6, AKASAKA 5-CHOME |
| TOKYO, JAPAN |
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Correspondence name and address
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FINNEGAN, HENDERSON, FARABOW ET AL.
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ERNEST F. CHAPMAN
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1300 I STREET NW
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WASHINGTON, DC 20005-3315
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