Patent Assignment Details
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| Reel/Frame: | 011611/0559 | |
| Pages: | 4 |
| | Recorded: | 03/12/2001 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/26/2002
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Application #:
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09731688
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Filing Dt:
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12/06/2000
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Title:
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GAS CLUSTER ION BEAM SUBSTRATE SURFACE TREATMENT METHOD AND APPARATUS
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Assignee
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| 37 MANNING ROAD |
| BILLERICA, MASSACHUSETTS 01821 |
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Correspondence name and address
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SAMUELS, GAUTHIER & STEVENS LLP
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MATTHEW E. CONNERS
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225 FRANKLIN STREET, SUITE 3300
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BOSTON, MA 02110
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