Patent Assignment Details
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Reel/Frame: | 011739/0982 | |
| Pages: | 4 |
| | Recorded: | 04/23/2001 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/05/2002
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Application #:
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09840320
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Filing Dt:
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04/23/2001
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Publication #:
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Pub Dt:
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09/20/2001
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Title:
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APPARATUS AND METHOD FOR IMPROVING PLASMA DISTRIBUTION AND PERFORMANCE IN AN INDUCTIVELY COUPLED PLASMA
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Assignee
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MINATO-KU |
3-6 AKASAKA 5-CHOME |
TOKYO 107, JAPAN |
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Correspondence name and address
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WOOD, HERRON & EVANS, L.L.P.
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KURT A. SUMME
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2700 CAREW TOWER
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441 VINE STREET
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CINCINNATI, OH 45202
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