Patent Assignment Details
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Reel/Frame: | 011813/0978 | |
| Pages: | 2 |
| | Recorded: | 05/18/2001 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09799816
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Filing Dt:
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03/05/2001
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Publication #:
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Pub Dt:
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10/11/2001
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Title:
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Substrate processing apparatus, substrate processing method and electronic device manufacturing method
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Assignee
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14-20, 3-CHOME HIGASHI-NAKANO |
NAKANO-KU, TOKYO 164-8511, JAPAN |
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Correspondence name and address
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HOGAN & HARTSON L.L.P.
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MICHAEL CRAPENHOFT, ESQ.
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500 SOUTH GRAND AVENUE, SUITE 1900
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LOS ANGELES, CA 90071
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