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Patent Assignment Details
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Reel/Frame:011890/0155   Pages: 11
Recorded: 06/06/2001
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
11/25/2003
Application #:
09875339
Filing Dt:
06/06/2001
Publication #:
Pub Dt:
12/12/2002
Title:
INDUCTIVELY-COUPLED PLASMA PROCESSING SYSTEM
Assignors
1
Exec Dt:
05/11/2001
2
Exec Dt:
05/31/2001
3
Exec Dt:
05/15/2001
4
Exec Dt:
05/21/2001
5
Exec Dt:
05/09/2001
6
Exec Dt:
05/09/2001
7
Exec Dt:
05/15/2001
Assignee
1
3-6 AKASAKA 5-CHOME, MINATO-KU
TBS BROADCAST CENTER
TOKYO 107, JAPAN
Correspondence name and address
WOOD, HERRON & EVANS LLP
DONALD F. FREI
2700 CAREW TOWER
441 VINE STREET
CINCINNATI, OH 45202

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