Patent Assignment Details
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Reel/Frame: | 011945/0326 | |
| Pages: | 2 |
| | Recorded: | 07/02/2001 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/10/2005
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Application #:
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09841800
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Filing Dt:
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04/24/2001
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Publication #:
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Pub Dt:
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01/03/2002
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Title:
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METHOD OF DEPOSITING METAL FILM AND METAL DEPOSITION CLUSTER TOOL INCLUDING SUPERCRITICAL DRYING/CLEANING MODULE
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Assignee
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AKASAKA 5-CHOME, MINATO-KU |
TOKYO 107-8481, JAPAN |
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Correspondence name and address
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HAVERSTOCK & OWENS LLP
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THOMAS B. HAVERSTOCK
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260 SHERIDAN AVENUE
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SUITE 420
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PALO ALTO, CALIFORNIA 94306
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